Inline Sputter

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  • Inline Sputter

▷ Fully Automated System, Various technology ensures stable quality and provides expandability
▷ Offers high mobility and maximizes productivity

Applications
- Applicable to various thin film (Metal, Oxide, TCO) process
- Applicable to various products (Plastic, Glass, etc.)
- Applicable to various shapes (Deco, Tool, Special model)
Specifications
Configuration Loading, Pre-treatment, Deposition, Buffer, Unloading
Tact time 3 min
Cathode Planar or Cylindrical Magnetron cathode
Target Metal, Oxide, TCO