Cluster Sputter

  • Inline Cluster
  • Inline Cluster

▷ Suitable for automated production lines and R&D systems
▷ Provides highly integrated technology and mechanisms

- Applicable to various thin film (metal, oxides, TCO) processes
- Applicable to highly integrated semiconductor and electronic component substrate processes
- Applicable to thin-film solar cell manufacturing processes
Configuration Loading, Transfer, Pre-treatment, Deposition(PVD, CVD)
Transfer Hi-vacuum automatic robot
Cathode Planar or Round Magnetron cathode
Target Metal, Oxide, TCO