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Cluster Sputter

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  • Inline Cluster
  • Inline Cluster

▷ Suitable for automated production lines and R&D systems
▷ Provides highly integrated technology and mechanisms

Applications
- Applicable to various thin film (metal, oxides, TCO) processes
- Applicable to highly integrated semiconductor and electronic component substrate processes
- Applicable to thin-film solar cell manufacturing processes
Specifications
Configuration Loading, Transfer, Pre-treatment, Deposition(PVD, CVD)
Transfer Hi-vacuum automatic robot
Cathode Planar or Round Magnetron cathode
Target Metal, Oxide, TCO