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Inline System

  • inline System
  • inline System

▷ Highly productive inline system (moves the substrate during the deposition process)
▷ Optimized OLED lighting panel production

Specifications
Deposition Type Inline Horizontal Type
Substrate Size Mass : ~ Gen.5.5
R&D ~ P/P : ~ Gen.2
Tact Time Mass : 2mins
R&D ~ P/P : 30mins
Evaporation Source Mass : Linear Source
R&D ~ P/P : Parallel Shot by Point Source
Thickness Uniformity Organic : ≤± 3%(Organic), ≤± 4%(Metal)
Align Accuracy Mechanical Align : ≤± 150㎛