Cluster System

  • Cluster System
  • Cluster System

▷ OLED Panel and material development systems
▷ Efficient and long-life panel production through deposition/encapsulation in ultra-high vacuum
▷ High efficiency and long life due to proper cleaning and removing out-gassing methods

Applications
- OLED Display Panel Productions
- OLED Display Research/Development
- OLED Material development
Specifications
Configurations Plasma Treatment, Organic/Meal deposition, Encapsulation unit
Features Source auto-feeding unit, Auto aligner unit
Source Point source, Linear source