Cluster System
¢¹ OLED Panel and material development systems
¢¹ Efficient and long-life panel production through deposition/encapsulation in ultra-high vacuum
¢¹ High efficiency and long life due to proper cleaning and removing out-gassing methods
Applications
- OLED Display Panel Productions
- OLED Display Research/Development
- OLED Material development
- OLED Display Research/Development
- OLED Material development
Specifications
Configurations | Plasma Treatment, Organic/Meal deposition, Encapsulation unit |
Features | Source auto-feeding unit, Auto aligner unit |
Source | Point source, Linear source |