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Batch Sputter

Batch sputtering is a system optimized for small-volume processes and flexibly applies various thin film conditions.

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R&D Sputtering System with Planar Magnetron Cathode for Electronic Components
Drum Type Dual-side Deposition Sputtering System for High Hardness Coating
  • Suitable system for R&D due to various thin-film deposition systems available

Applications

  • Integrated optical devices and electronic components
  • Hardness Coating

Specifications

Configuration Pre-treatment, Deposition
Features Drum type, Dual-side deposition
Cathode Planar Magnetron cathode
Target Metal, Oxide, TCO