Batch Sputter
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Products Sputtering system Batch Sputter
▷ Suitable system for R&D due to various thin-film deposition systems available
Applications
- Integrated optical devices and electronic components
- Hardness Coating
- Hardness Coating
Specifications
| Configuration | Pre-treatment, Deposition |
| Features | Drum type, Dual-side deposition |
| Cathode | Planar Magnetron cathode |
| Target | Metal, Oxide, TCO |